Content

Light & Engineering 32 (4) 2024
Volume 32Date of publication 08/15/2024
Pages 59–66
Abstract:
In this work, a computerized measuring device is developed and created for non-destructive measurement of the concentration distribution of an electrically active impurity in p–n structures. The concentration distribution is measured by recording the parameters of the barrier capacity when a small two-frequency signal is exposed to the structure under the study. The device makes it possible to study the concentration profile of p–n structures in the area of the location of quantum wells with a depth resolution of up to 3–4 atomic layers in the range of changes in the width of the spatial charge region under the influence of a constant bias voltage. The measurement results are processed, and the measuring device is controlled by a microcontroller.
References:
1. Manyakhin, F. I., Varlamov, D. O., Kuksa, V. V. and Mokretsova, L.O. Mechanism and Regularity for Luminous Flux Decreasing of Efficient Small Powered LEDs Based on GaN/InGaN Structures at High Current Density // Light & Engineering, 2024, Vol. 32, # 3, pp. 20–29. 2. Manyakhin, F.I. Instability of the distribution of concentration of electrically active centres near the p-n junction of AlGaN/InGaN/GaN LED structures with quantum wells during direct current flow // Izv. VUZov, 2005, Materialy elektronnoy tekhniki, No. 3, pp. 84‒88. 3. Blood, P., Orton, J.W. Methods for Measuring the Electrical Properties of Semiconductors, Part 1 // Zarubezhnaya radioelektronika, 1981, No. 1, pp. 3‒50. 4. Berman, L.S. Capacitive Methods for Studying Semiconductors // AN SSSR, Phys.-techn. in-t im. A.F. Ioffe, Nauka, Leningr. otdelenie, Leningrad,1972, [in Russian]. 5. Berman, L. S., Lebedev, A.A. Capacitive Spectroscopy of Deep Centres in Semiconductors // Nauka, Leningrad, 1981, [in Russian]. 6. Berman, L.S. Purity Control of Semiconductors by the Method of Capacitance Transient Spectroscopy // Electronic Integral Systems,1995, [in Russian]. 7. Patent RU2393584C1, Russia. 8. Patent SU1150589A1, Russia. 9. Shumsky, I.A. Measuring capacitance-voltage characteristics of semiconductor devices, choice of a modern budget solution // Kontrol’no-izmeritel’nyye pribory i sistemy, 2017, No. 2, pp. 10‒16. 10. Sukegavwa, T., Ogita, M. Two-frequency method for measuring impurity profiles // Rev/ Sci. Instrum., 1979, No. 50, pp. 41‒45.
Keywords
- distribution profile of an electrically
- active impurity
- measuring device
- LED structures
- capacitive non-destructive method
Recommended articles
Physical–Mathematical Model Of The Internal Quantum Efficiency Dependence On The Current Of Leds With Quantum Wells Light & Engineering Vol. 28, No. 6
The Regularity of the Decrease in the Quantum Yield of Quantum-Wells LEDs at the Long-Term Current Flow from the ABC Model Position L&E, Vol. 29, No. 5 (2), 2021
Active Area Temperature Measurement of Medium-Power LEDs by Dynamics Changes in Forward Voltage during Current Heating and Cooling L&E, Vol.31, No.5, 2023